">
Evactron<sup>®</sup> 25Zephyr™ De-Contaminator

Evactron® 25Zephyr™ De-Contaminator

This easy to use tabletop model easily removes atmospheric hydrocarbons and carbon contamination from SEMs, FIBs, and other vacuum chambers. The Evactron® 25Zephyr De-Contaminator uses a remote RF plasma to produce gas-phase radicals that flow downstream through the chamber eliminating contamination. The Evactron® 25Zephyr is created for chambers that use turbo molecular pumps (TMPs). The 25Z is designed to clean/de-contaminate in the turbo pressure regime at 1-50 mTorr and has no adverse effects on the TMP temperatures. The Evactron Model 45 De-Contaminator can also be upgraded to the Zephyr cleaning.

Features:
• Clean chambers at turbo pump pressures
• 5-20 Watts RF power
• ≥10x improved cleaning rate
• One button operation
• 1-50 mTorr operating pressure
Benefits:
• No stress to the turbo molecular pump
• Safely de-contaminates the chamber without damage to sensitive components
• Shorter cleaning time, giving increased production with less system down time
• Cleans chamber while in “pump down”
• Increased mean free path, yet ion damage free
The Evactron® 25 Zephyr De-Contaminator also comes with a free 5-year warranty (must return to factory for repair).


Please complete the form below downloading the brochure(s)

After "Submit" -- please check your Email.
The brochure will send to you immediately.
If you do not receive, please verify your Email address again.
Thank you!

Product Description

This easy to use tabletop model easily removes atmospheric hydrocarbons and carbon contamination from SEMs, FIBs, and other vacuum chambers. The Evactron® 25Zephyr De-Contaminator uses a remote RF plasma to produce gas-phase radicals that flow downstream through the chamber eliminating contamination. The Evactron® 25Zephyr is created for chambers that use turbo molecular pumps (TMPs). The 25Z is designed to clean/de-contaminate in the turbo pressure regime at 1-50 mTorr and has no adverse effects on the TMP temperatures. The Evactron Model 45 De-Contaminator can also be upgraded to the Zephyr cleaning.

Features:
• Clean chambers at turbo pump pressures
• 5-20 Watts RF power
• ≥10x improved cleaning rate
• One button operation
• 1-50 mTorr operating pressure
Benefits:
• No stress to the turbo molecular pump
• Safely de-contaminates the chamber without damage to sensitive components
• Shorter cleaning time, giving increased production with less system down time
• Cleans chamber while in “pump down”
• Increased mean free path, yet ion damage free
The Evactron® 25 Zephyr De-Contaminator also comes with a free 5-year warranty (must return to factory for repair).


Please complete the form below downloading the brochure(s)

After "Submit" -- please check your Email.
The brochure will send to you immediately.
If you do not receive, please verify your Email address again.
Thank you!

Request for Quotation(*Compulsary Fields)

Your Name:*

Company:*

Email Address:*

Contact Number:*

Occupation:*

Product of Interest:*

List empty! Please add some item(s) first in your enquiry list.