Larger specimen chamber
– Robust stage for flexibility in sample size, shape & weight
– Specimen protection by its exchange sequence
– Increased viewing area with SEM MAP expanding sample navigation boundary
Improved automatic functions
– Multiple operation modes for easy operation & flexibility
– Automatic functions for various users via AFS, ABCC, AFC, ASC, IFT, Auto Focus
– Optional Multi Zigzag enables wide area observation across multiple areas
Integrated solutions and detectors for various applications
– High sensitivity detectors supporting all observation requirements, up to 20 ports
– Optional SEM/EDS integration system, to allow full control by SEM graphic user interface
– High sensitivity detectors, includes segmented BSED for composition & topography observation, optional UVD for CL observation, optional STEM holder for transmission image of thin samples
– Optional software, includes Hitachi Map 3D and Image-Pro® for image processing, measurement, analysis, modelling

Sample : CNT

Accelerating voltage : 30 kV

Image signal : STEM

Magnification : 30,000x

HITACHI SU3800/SU3900 SEM

Deliver both operability and expandability
User can automate many operations and efficiently utilize their high performance
Equipped with a large multipurpose specimen chamber to accommodate observation of large samples