HITACHI Regulus Series Ultra-High Resolution SEM

• Four models: Regulus 8100, Regulus8220, Regulus8230, and Regulus8240
• Features resolutions down to 0.7 nm in Regulus 8220/8230/8240 models and 0.8 nm in Regulus 8100 model
• Employs cold-field-emission (CFE) gun optimized for high-resolution imaging at low accelerating voltages; for high-resolution images up to 2 million times magnification

Enhanced user-support functions, including functions to assist in signal detection system operation and device-maintenance functions