HITACHI HD-2700 Spherical Aberration Corrected STEM/SEM

80-200 kV field-emission-gun scanning transmission electron microscope (STEM) with secondary electron (SE) imaging capability
Bulk and surface structures of a specimen can be imaged simultaneously
With the option for a probe-forming aberration corrector, ultra-high resolution can be achieved for both STEM and SE imaging, with minimal user’s effort in doing aberration correction

High-resolution STEM imaging
– HAADF-STEM image 0.136 nm, FFT image 0.105 nm (optional HR lens)
– BF STEM image 0.204 nm (w/o Cs-corrector)
High-speed & high-sensitivity EDX analysis: Probe current × 10 times
– Timely and rapid elemental mapping
– Low-concentration element detection
Hitachi-developed Cs-corrector
– Equipped with a probe-forming spherical aberration corrector developed by Hitachi, the automatic aberration-correction process takes a short time and does not require prior experience for aberration correction
Seamless solution from sample preparation to observation & analysis
– Holder compatible with Hitachi Focused Ion Beam (FIB)

Cross Section BF-STEM Images of 32 nm NMOS Transistor
HD-2700 with aberration corrector
Acceleration Voltage : 200 kV