Hitachi FlexSEM 1000 / FlexSEM 1000 ll

Hitachi FlexSEM 1000 / FlexSEM 1000 ll

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The FlexSEM 1000 VP-SEM combines innovative technological features with an intuitive interface, to deliver adaptability and flexibility in a powerful, automated, lab-friendly package. Cutting-edge technology and circuitry provides unrivaled imaging performance, even in variable-pressure environments, a feature previously only available in a full-sized SEM. This SEM runs on clean energy for an economical analytical tool, without compromising performance.

The FlexSEM will change your view of electron microscopy!

The FlexSEM 1000 Scanning Electron Microscope features newly designed electron optical and signal detection systems providing unparalleled imaging and analytical performance in a lab-friendly configuration. Keeping efficiency in mind, the FlexSEM features an adaptable, separable, and compact design, such that it can be installed in limited office, laboratory, or even mobile spaces. Engineered to appeal to both the novice and expert microscopist for a wide range of applications, including biological and advanced material specimens, this microscope will certainly expectations.

Compact & High-Performance Column

Best-in-class resolution in a compact system. The FlexSEM employs a newly designed electrical optical system with a reliability-proven high-sensitivity detector, achieving imaging at 4 nm.

High resolution image

The electron optics incorporate a low aberration objective lens and a unique gun bias system that allows delivery of high emission current.

Ultra-Variable-Pressure Detector

Novel low vacuum technologies enable observation of the surface of non-conductive specimens without preprocessing, across the entire pressure and accelerating voltage ranges.

New & Improved Auto Functions

The user interface is easy to operate even by novice users, and with the various automated functions, high-quality and quick data acquisition can be accomplished regardless of user experience level. A touch panel operation is possible.

Intuitive & Correlative Navigation

SEM MAP helps to locate regions of interest quickly, and delivers accurate correlated optical and SEM images using only one click. Optical and EM correlation function, SEM MAP is fully integrated into the graphical user interface. 



A compact design (450 mm wide) minimizes system footprint. The FlexSEM is designed with separable units for flexible system placement. The entire system requires only a standard wall outlet for power.


The newly developed electron optical column and Ultra-Variable-Pressure Detector (UVD) enable superior imaging of specimen surfaces at low-accelerating-voltages and low-vacuum conditions.


The user-friendly GUI as well as accurate and fast Auto Focus Control (AFC) and Auto Brightness and Contrast Control (ABCC) algorithms, take only 5 seconds to enable optimized imaging performance with minimal time and effort.


The "SEM MAP" function makes traversing across an entire specimen effortless. Navigate your sample with the use of an optical camera, and deliver accurate correlated Optical and SEM images using only one click.



Wedge Bond

Accelerating Voltage: 5 kV
Vacuum: 30 Pa
Magnification: 1,000X
Signal: BSE, Without metal coating

Accelerating Voltage: 5 kV
Vacuum: 30 Pa
Magnification: 5,000X,  
Signal: BSE, Without metal coating


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