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Plasma Cleaning
EVACTRON Model 25 Plasma Cleaner ZEPHYR Series
EVACTRON 50 E-TC E50 Series
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EVACTRON Model 20EP™ E-Series
EVACTRON Model 25 Plasma Cleaner ZEPHYR Series
Designed for SEM/FIB systems
Fast and efficient hydrocarbon removal
No damage to samples or sensitive components
Operates at roughing and turbomolecular pressures
Remote computer interface
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Description
Description
Features:
Desktop controller
SEM/FIB chambers or load locks
2 operating regimes:
– Classic mode (roughing pressures)
– T-pump mode (turbomolecular pressures)
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