Features:
- Desktop controller
- SEM/FIB chambers or load locks
- 2 operating regimes:
– Classic mode (roughing pressures)
– T-pump mode (turbomolecular pressures)
EVACTRON Model 25 Plasma Cleaner ZEPHYR Series
- Designed for SEM/FIB systems
- Fast and efficient hydrocarbon removal
- No damage to samples or sensitive components
- Operates at roughing and turbomolecular pressures
- Remote computer interface
Description
