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Film Stress Bow Measurement Frontier Semiconductor FSM
FSM 900 Series

FSM 900 Series

Stress Hysteresis in vacuum or gas up to 900C for the study of annealing cycles.
Thermal Desorption, Film Shrinkage, Reflectivity, and Resistivity options provide additional insight to causes of material changes with temperature.
900TC-VAC -- 300mm chamber. Manual loading.
900C2C -- 300mm fully automated Cassette to Cassette system.

Product Description

Stress Hysteresis in vacuum or gas up to 900C for the study of annealing cycles.
Thermal Desorption, Film Shrinkage, Reflectivity, and Resistivity options provide additional insight to causes of material changes with temperature.
900TC-VAC -- 300mm chamber. Manual loading.
900C2C -- 300mm fully automated Cassette to Cassette system.

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