Features:
- Analyzer
180° double focusing hemispherical analyzer with 128-channel detector - X-ray source
Al Ka micro-focused monochromator with variable spot size (30-400µm in 5µm steps) - Ion Gun
Energy range 100-4000eV - Charge Compensation
Dual beam source - Sample Size
4-axis sample stage, 60 x 60mm sample area, 20mm maximum sample thickness - Vacuum System
2x 260L/s turbo molecular pumps for entry and analysis chambers - Options
Vacuum transfer module, tilt module for ARXPS, sample bias module

Figure: C1s spectrum after cluster ion etching