The Q300T T ,Q300T T Plus is a large chamber, turbomolecular-pumped coating system ideally suited for sputtering a single large diameter specimen up to 8"/200mm (eg a wafer) or multiple smaller specimens over a similar diameter.
The Q300T T,Q300T T Plus is fitted with three individual sputtering heads to ensure even deposition on a range of specimen types. The system is designed to sputter both oxidising metals, eg chromium (Cr) and aluminium (Al), and non-oxidising (noble) metals, eg gold (Au), gold/palladium (Au/Pd) and platinum (Pt). The Q300T T,Q300T T Plus is fitted with three individual sputtering heads to ensure even sputtering deposition over a large diameter. Chromium (Cr) targets are fitted as standard.
For sputtering non-oxidising metals only, see the Q300R T Triple Target, Large Chamber, Rotary-Pumped Sputter Coater.
For sequential sputtering of two different oxidising or non-oxidising metals, see the Q300T D Dual Target Sequential Sputtering System.