Hitachi Ultra-high Resolution SEM Regulus Series

Hitachi Ultra-high Resolution SEM Regulus Series

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As a new brand of FE-SEMs, the Regulus series lineup comprises four models: the Regulus8100, Regulus8220, Regulus8230, and Regulus8240, all of which extend the functions of the SU8200 series with the use of a common platform. With optimized electron optical systems, the new Regulus series features resolutions down to 0.7 nm in the Regulus8220/8230/8240 models and 0.8 nm in the Regulus8100 model.

The Regulus series employs a novel cold-field-emission (CFE) gun optimized for high-resolution imaging at low accelerating voltages. This CFE gun makes it possible to magnify high-resolution images up to 2 million times,*1 compared with 1 million times in previous models.

User-support functions have also been enhanced so that the advanced performance of the series can be fully leveraged, including functions to assist the operation of the signal detection system for analyzing diverse types of materials, as well as device-maintenance functions.

*1 Only in Regulus8220/8230/8240


  • Cold field emission (CFE) gun optimized for low-voltage, high-resolution imaging with low aberration (Regulus8220/8230/8240: 0.7 nm/1 kV; Regulus8100: 0.8 nm/1 kV)
  • Maximum magnification doubled from 1 million times to 2 million times*2
  • User-support functions to ensure high performance.

* 2 Only in Regulus8220/8230/8240

HR & ULV Imaging

Specimen: Gold particle on Carbon
Landing voltage: 10 V

UHR imaging

Specimen: Catalyst
Accelerating voltage: 30 kVHR imaging

HR & LV EDX analysis

Specimen: Tin ball
Landing voltage: 1.5 kV

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