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HITACHI SU8700 Ultra-High-Resolution Schottky SEM

HITACHI SU8600 Ultra-High-Resolution SEM

The SU8600 brings in a new era of ultrahigh-resolution cold-field emission scanning electron microscopes to the long-standing Hitachi EM line-up. This revolutionary CFE-SEM platform incorporates multifaceted imaging, automation, increased system stability, efficient workflows for users of all experience levels, and more.

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  • Description
Description

Features:

  • Ultrahigh-Resolution
    Hitachi’s high-brightness cold field emission source provides ultrahigh-resolution images even at Ultra-low voltages.
  • A Smart Detection System for Low Voltage BSE Imaging
  • Fast BSE Imaging: New Out-Column Crystal Type BSED (OCD)
  • Enhanced User Experience with Advanced Automation
    The “EM Flow Creator“ software option allows users to configure repeatable SEM operation sequences.Various SEM functions can be assembled in the EM Flow Creator’s window by a drag-and-drop method and then saved as a recipe for later use.Once a recipe is configured, automated data collection under the set conditions can be performed with high accuracy and repeatability.
  • Flexible Interface
    Dual monitor configuration supports a flexible and highly efficient workspace. Display and save 6 signals simultaneously in order to acquire more information in less time.

Application

Top : RHO-type Zeolite particle at low-kV. In order to reveal fine steps structure on surface, the image was acquired at 0.8 kV of landing voltage. This allows the very fine structure of surface steps to be clearly visible (image on bottom).

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