Features:
- Ultrahigh-Resolution
Hitachi’s high-brightness cold field emission source provides ultrahigh-resolution images even at Ultra-low voltages. - A Smart Detection System for Low Voltage BSE Imaging
- Fast BSE Imaging: New Out-Column Crystal Type BSED (OCD)
- Enhanced User Experience with Advanced Automation
The “EM Flow Creator“ software option allows users to configure repeatable SEM operation sequences.Various SEM functions can be assembled in the EM Flow Creator’s window by a drag-and-drop method and then saved as a recipe for later use.Once a recipe is configured, automated data collection under the set conditions can be performed with high accuracy and repeatability. - Flexible Interface
Dual monitor configuration supports a flexible and highly efficient workspace. Display and save 6 signals simultaneously in order to acquire more information in less time.
Application
Top : RHO-type Zeolite particle at low-kV. In order to reveal fine steps structure on surface, the image was acquired at 0.8 kV of landing voltage. This allows the very fine structure of surface steps to be clearly visible (image on bottom).
