Features:
- The SEM column and FIB column are orthogonally arranged to optimize the column positioning for 3D structural analysis
- The combination of high-brightness cold-field-emission electron source and high-sensitivity optics support analysis of a wide range of materials from biological tissues to magnetic materials
- The Micro-sampling system and Triple Beam system allow high-quality sample preparation for TEM and atom-probe applications
- Ion milling and observation at normal incidence in real-time for true analytical imaging
- Optional Cut & See, 3D-EDS, 3D-EBSD available for a wide variety of materials
Application

Specimen: 14 nm SoC device
Final milling: 1 kV Ar
Observation: HF-3300 Cold FE-TEM (Accelerating voltage: 300 kV)