HITACHI HF-5000 FE TEM

Unique 200 kV aberration-corrected TEM/STEM: the perfect harmony of imaging resolution and analytical performance
078 nm spatial resolution in STEM is achieved together with high specimen-tilt capability and large solid angle EDX detector(s), all in a single objective lens configuration
Features including fully automated aberration corrector, symmetrical dual SDD EDX and Cs-corrected SE imaging, with advanced TEM/STEM technologies
Optimum combination of sub-Å imaging and analysis, as well as the flexibility and unique capabilities to address the most advanced studies

Hitachi fully automated probe-forming spherical aberration corrector
High-brightness and high-stability cold FE electron gun (Cold FEG)
Ultra-stable column and power supplies for enhanced instrument performance
Simultaneous Cs-corrected SEM & STEM imaging capability with atomic resolution
New high-stability side-entry specimen stage and specimen holders
Symmetrically opposed dual 100 mm2 EDX (optional) detectors : “Symmetrical Dual SDD*”
Newly designed enclosure for optimum performance in real laboratory environments
A wide range of Hitachi advanced specimen holders (optional)

Si(211) single crystal HAADF-STEM image (left), image intensity profile (right lower) and FFT power spectrum (right upper)