Features:
- Hitachi fully automated probe-forming spherical aberration corrector
- High-brightness and high-stability cold FE electron gun (Cold FEG)
- Ultra-stable column and power supplies for enhanced instrument performance
- Simultaneous Cs-corrected SEM & STEM imaging capability with atomic resolution
- New high-stability side-entry specimen stage and specimen holders
- Symmetrically opposed dual 100 mm2 EDX (optional) detectors : “Symmetrical Dual SDD*”
- Newly designed enclosure for optimum performance in real laboratory environments
- A wide range of Hitachi advanced specimen holders (optional)
Application

Si(211) single crystal HAADF-STEM image (left), image intensity profile (right lower) and FFT power spectrum (right upper)