Features:
- High-Performance FE-SEM Column with Dual Lens Mode
– Ultra-high-resolution observation (HR mode: semi-in-lens)
– High-accuracy end-point detection in real time
(FF mode: Field Free (time sharing mode) - High-Throughput Material Processing
– Ultra-fast processing with high ion-current density
(Max. beam current: 100 nA)
– User programmable script for auto processing and observation - Micro-sampling System
– Fully integrated sample-orientation control for
Anti-Curtaining Effect(ACE technology)
– TEM sample preparation for uniform lamellas at any orientation - Triple-Beam Capable, Delivering Advanced Quality Results
– Low-acceleration noble-gas ion-beam material processing
– Innovative functions reduce Ga ion related and other milling artifacts - Large Multi-Port Chamber and Stage for Various Applications
– Large sample size capable system with exceptional stage stability
– Full range enhanced long-distance tracking (155 x 155mm) - Refined Electron Optics and Multi-Signal Detection
- High-Resolution SEM Imaging & high-performance FIB
- Time Sharing Mode
– To maximize SEM observation while ion milling simultaneously - Cut & See for 3D structural analysis
- High-Quality TEM Specimen Preparation Using Triple-Beam Technology
- Optimized GUI for Maximum Efficiency
- Next-Generation Interface for Custom Processing Modes and Recipes
- Sample Chamber and Stage for Various Applications
Application
– High speed ion milling, SIM image
– Highlighting grain contrast of bond wire
