Bow and Global Film Stress Measurement.
Non-contact full wafer stress mapping for semiconductor and flat panel application.
Dual Laser Switching Technology.
128NT -- Base system. Up to 200mm wafer. Rotation Stage.
128L -- Up to 300mm wafer. Rotation Stage.
128G - 450 -- NEW. Up to 450mm wafer. Flat panels. Rotation Stage.
128L C2C -- Cassette to cassette