Additional features : Dual Gun Baking system
Heatable Movable Aperture
Super ExB filter
DP/TMP(option)
Standard features 1. High resolution at low accelerating voltage.
2. Routine microscopy at a long working distance of 12mm.
3. Integrated electron detector for both SE and BSE with signal manipulation
design.
4. Unique objective lens design permits simultaneous use YAG type BSE and EDX
detector.
5. Fully digital imaging, image processing and archiving system.
6. Dual SE detectors for versatile imaging.
7. New ExB energy filter.
The S-4700 FE-SEM combines the versatility of PC control with a novel electron optical column to give exceptional performance on large and small specimens. Resolution of 1.5nm at 15kV is guaranteed at the EDX and specimen exchange position of 12mm working distance.
The S-4700 also offers excellent low kV performance with guaranteed resolution of 2.1 nm at 1 kV, now at a working distance of 1.5mm. Two versions, Type I and Type II, are available, differing in the specimen stage size. The S-4700 Type II features a five axis eucentric motorized stage which will accommodate specimens up to 150 mm in diameter.
Pre-programmed operating modes allow the user to switch from high-resolution conditions to microanalysis conditions at the click of the mouse with no change of objective aperture. The fully integrated new ExB filter opens the door to low voltage, high resolution, backscattered imaging never before possible on a conventional SEM.
The flexible design of the S-4700 will allow the user to integrate optional accessories. This integrated SEM system offers a total analytical microscopy tool even for the most discriminate user.