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S-36000N

 

 Resolution :
 3.0 nm @ 25kV, High Vacuum mode
 4.0 nm@25kV,Variable pressure mode
 Stage :
 1 type (X/Y : 150/110 mm)
 Sample Size :
 254 mm
 Additional features :
 Dual Gun Bias
 Long Liner Tube design

Standard features
1. Extra large capacity specimen chamber with high precision 5 axis motorised
    eucentric stage.

2. Patented Dual Bias and Secondary Electron Bias Plate.

3. Variable Pressure technology.

4. 5 horizontal and 3 inclined chamber ports.

5. Windows XP with full EDS integration packages for ultimate ease of use.

6. Optional Environmental Secondary Electron Detector (ESED) is available for SE
    imaging during Variable Pressure observation.

7. Industry’s largest pumping capacity for a VP-SEM.

8. PCI image database software.

   The Hitachi S-3600N is designed for applications where sample size and weight    are as important as image performance. It gives users guaranteed resolution of    3.0nm at high vacuum mode and resolution of 4.5nm at variable pressure mode.

   The S-3600N, with variable pressure technology, allows examination of heavy    samples with diameters up to 10 inches and permits examination of virtually any    type of sample without the need for traditional sample preparation techniques. A    total of 12 chamber ports provide the best possible geometry for numerous    detectors and accessories such as EDX, WDX, EBSP, CL, BSE, electrical    feedthrough and chamberscope.

   The patented Dual Bias and Secondary Electron Bias plate increase beam current    at low voltage generating exceptional image recordings. Coupled with Hitachi’s    reputation for reliability, service and customer satisfaction, the S-3600N is a class    above the rest for overall performance and ease of use.

 

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