The Evactron De-Contaminator is a RF plasma asher for external mounting on vacuum chambers and electron microscopes. Plasma Cleaning using the Evactron D-C improves SEM (scanning electron microscope) performance.
Evactron® RF plasma cleaner removes atmospheric molecular contamination, improves scanning electron microscope (SEM) performance. Cleans and removes oils and other hydrocabon from all vacuum chambers for clean images, carbon free analysis, and clean substrates for improved adhesion and uniformity of fine vacuum coatings. The Evactron De-Contaminator is a RF plasma asher for external mounting on vacuum chambers and electron microscopes. Low power prevents instrument damage! Uses air for gentle oxidation.
With The Evactron® RF plasma cleaner you get SEM
images with higher resolution and contrast, carbon free EUV optics and superior fine vacuum film coatings!
EVACTRON® Anticontaminator - 2 configurations
How Evactron® RF Plasma Cleaning Works
Evactron® RF plasma creates oxygen radicals that sweep hydrocarbons, organics, and surface carbon from Electron Microscopes and fine vacuum coating systems.
Atmospheric contaminants get swept through the roughing pump. After cleaning, turn off the Evactron® RF plasma and you get great SEM photos and a clean substrates for your fine vacuum coatings.
Typical SEM Oil Contamination Problems Solved by Evactron cleaning:
Black Squares and Oil Buildup on X-ray Detectors
The Causes: Specimen borne hydrocarbons, Oil Backstreaming, oil built-in during manufacturing, poor vacuum practice, dirty specimens, and the environment.
The Solution: Plasma cleaning inside the SEM and other high vacuum chambers. The Evactron process is better than traps or dry pumps because it actively removes all hydrocarbons rather than trying to stop the source.
