The Q300R T is a large chamber, rotary-pumped coating system ideally suited for sputtering a single large diameter specimen up to 8"/200mm (eg a wafer), or multiple smaller specimens over a similar diameter.
The Q300R T is fitted with three individual sputtering heads to ensure even deposition on a range of specimen types. The system is designed to sputter non-oxidising (noble) metals - eg gold (Au), gold/palladium (Au/Pd) and platinum (Pt) - and is fitted with three individual sputtering heads to ensure even sputtering deposition over a large diameter. Gold (Au) targets are fitted as standard.
For sputtering non-oxidising and oxidising metals, see the Q300T T Triple Target, Large Chamber, Turbo-Pumped Sputter Coater.
For sequential sputtering of two different oxidising or non-oxidising metals, see the Q300T D Dual Target Sequential Sputtering System.