Kurt J. Lesker PRO Line PVD Series – Versatile Sputtering, Electron Beam, Thermal, & Organic Evaporation Deposition Platform

Kurt J. Lesker PRO Line PVD Series – Versatile Sputtering, Electron Beam, Thermal, & Organic Evaporation Deposition Platform

 

The PRO Line PVD Series utilizes a modular design configurable for a variety of thin film deposition applications.

  • Available in three increasing chamber sizes: PVD75, PVD200, and PVD500
  • Available with TORUS® Mag Keeper™ UHV Compatible Circular  Magnetron Sputtering Sources in 2", 3", 4" diameters
  • Available with TORUS® Linear Magnetrons
  • Available with Multi-pocket electron beam evaporation sources
  • Available with multiple thermal evaporation source configurations
  • Up to two organic evaporation sources available
  • Multi-technique options available. Examples: Electron beam + Sputtering, Electron beam + evaporation
  • Wet or dry rough pumping, turbo pump, or cryogenic pump high vacuum pumping options available
  • Standard configurations compatible with up to 11" to 20" OD substrates (pending chamber size); up to 850°C heating, cooling, and biasing options available
  • Single and multi-wafer load lock options available for substrates up to 6"
  • PRO Line series of PVD tools include KJLC's innovative eKLipse™ advanced control package

 


Please complete the form below downloading the brochure(s)

After "Submit" -- please check your Email.
The brochure will send to you immediately.
If you do not receive, please verify your Email address again.
Thank you!

Product Description

 

The PRO Line PVD Series utilizes a modular design configurable for a variety of thin film deposition applications.

  • Available in three increasing chamber sizes: PVD75, PVD200, and PVD500
  • Available with TORUS® Mag Keeper™ UHV Compatible Circular  Magnetron Sputtering Sources in 2", 3", 4" diameters
  • Available with TORUS® Linear Magnetrons
  • Available with Multi-pocket electron beam evaporation sources
  • Available with multiple thermal evaporation source configurations
  • Up to two organic evaporation sources available
  • Multi-technique options available. Examples: Electron beam + Sputtering, Electron beam + evaporation
  • Wet or dry rough pumping, turbo pump, or cryogenic pump high vacuum pumping options available
  • Standard configurations compatible with up to 11" to 20" OD substrates (pending chamber size); up to 850°C heating, cooling, and biasing options available
  • Single and multi-wafer load lock options available for substrates up to 6"
  • PRO Line series of PVD tools include KJLC's innovative eKLipse™ advanced control package

 


Please complete the form below downloading the brochure(s)

After "Submit" -- please check your Email.
The brochure will send to you immediately.
If you do not receive, please verify your Email address again.
Thank you!

Additional Information

Suppliers

QUASI_S

Request for Quotation(*Compulsary Fields)

Your Name:*

Company:*

Email Address:*

Contact Number:*

Occupation:*

Product of Interest:*

List empty! Please add some item(s) first in your enquiry list.