Kurt J. Lesker PRO Line PVD Series – Versatile Sputtering, Electron Beam, Thermal, & Organic Evaporation Deposition Platform

Kurt J. Lesker PRO Line PVD Series – Versatile Sputtering, Electron Beam, Thermal, & Organic Evaporation Deposition Platform

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Description

 

The PRO Line PVD Series utilizes a modular design configurable for a variety of thin film deposition applications.

  • Available in three increasing chamber sizes: PVD75, PVD200, and PVD500
  • Available with TORUS® Mag Keeper™ UHV Compatible Circular  Magnetron Sputtering Sources in 2", 3", 4" diameters
  • Available with TORUS® Linear Magnetrons
  • Available with Multi-pocket electron beam evaporation sources
  • Available with multiple thermal evaporation source configurations
  • Up to two organic evaporation sources available
  • Multi-technique options available. Examples: Electron beam + Sputtering, Electron beam + evaporation
  • Wet or dry rough pumping, turbo pump, or cryogenic pump high vacuum pumping options available
  • Standard configurations compatible with up to 11" to 20" OD substrates (pending chamber size); up to 850°C heating, cooling, and biasing options available
  • Single and multi-wafer load lock options available for substrates up to 6"
  • PRO Line series of PVD tools include KJLC's innovative eKLipse™ advanced control package

 

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