The 8200 Series FE-SEM employs a novel cold field emission (CFE) gun for improved imaging and analytical performance. The newly designed Hitachi CFE gun complements the inherent high resolution and brightness of conventional CFE with increased probe current and beam stability.
SU8200 features Hitachi’s new source and detection technology:
• Increased probe current for S/N and analytical performance
• Unparalleled imaging throughput with improved CFE beam stability
• Enhanced deceleration and selective energy filter providing fine contrast differentiation at low accelerating voltages
The members of the SU8200 family offer a variety of stage, specimen chamber and signal detection system configurations to meet the wide range of customer-specific needs for indispensable ultra-high-resolution microscopy in the nanotechnology fields, such as semiconductors, electronics, catalysis and other functional materials, biotechnology, pharmaceuticals, and more.