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Film Stress Bow Measurement Frontier Semiconductor FSM
FSM 128 Series

FSM 128 Series

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Description

Bow and Global Film Stress Measurement.
Non-contact full wafer stress mapping for semiconductor and flat panel application.
Dual Laser Switching Technology.
128NT -- Base system. Up to 200mm wafer. Rotation Stage.
128L -- Up to 300mm wafer. Rotation Stage.
128G - 450 -- NEW. Up to 450mm wafer. Flat panels. Rotation Stage.
128L C2C -- Cassette to cassette

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