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Evactron<sup>®</sup> CombiClean™ System

Evactron® CombiClean™ System

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Description

The Evactron® CombiClean™System combines onboard vacuum cleaning chamber and external PRS (Plasma Radical Source) control in one unified system. Designed as a complete cleaning solution, the Evactron CombiClean System features an integrated vacuum chamber for desktop cleaning samples and vacuum parts, as well as an external Plasma Radical Source (PRS) for Evactron in-situ cleaning of E-beam instruments such as SEMs, Focus Ion Beams FIBs, and other analytic instruments by removing carbon contamination. The system monitors operation of either PRS unit, has internal memory, and is designed for routine operation with minimal operator training. Onboard control allows for changing the cleaning modes between external and internal PRS with just the flip of a switch. This system is compatible with rotary vane pumps without the worry of oil backstreaming. A dry nitrogen purge feature keeps specimens clean after a plasma cleaning, and a storage mode allows you to continue dry nitrogen purging a sample while the external PRS is in use.

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System Highlights
The system features a microprocessor with embedded software to regulate a leak valve and control the chamber pressure by a MicroPirani gauge. The microprocessor also regulates the RF power, has a clock to time the downstream plasma cleaning and nitrogen purging cycles, and records the operational and fault log. Cleaning with the Evactron CombiClean System may be setup from either the front panel or a remote computer.
• VentDetect™ Technology
• Compatible with rotary vane pumps without the worry of oil backstreaming
• Dry Nitrogen purge feature keeps specimens clean after plasma cleaning
• Storage mode allows continued dry nitrogen purging of samples while external PRS is in use
• System monitors operation of either PRS unit
• Onboard control allows for cleaning modes between internal and external PRS with just the 0ip of a switch
• Wide Pressure Range
The Evactron® CombiClean™ System also comes with a free 5-year warranty (must return to factory for repair).

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