XEI Science Plasma Cleaner

XEI Science Plasma Cleaner

XEI Scientific, Inc. is the world leader in downstream RF plasma cleaners. Quasi-S represents them exclusively in all their products with capability to support, train and provide technical advice. The plasma cleaners are specially made for the removal of Hydrocarbons from Scanning Electron Microscopes (SEM) and vacuum chambers. In particular, XEI manufactures the Evactron® De-Contaminator, a compact remote plasma cleaning device, which comes in a variety of models to fit user needs. The new models in the Zephyr and E-Series feature fast flowing afterglow cleaning with air when pumped with a turbo molecular pump to below 30 mTorr or 4 Pa or 40 mBar. The E-Series are our new simplified units to provide reliable plasma cleaning at the highest performance with the lowest cost. Evactron Plasma Cleaners are the manufacturer’s choice for cleaning new and old SEM and FIB.
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  • e Model CQuick view

    Evactron® Model C De-Contaminator

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    This model is the most cost-efficient and least complex cleaning system offered by XEI Scientific. Ashing of carbon contamination such as hydrocarbons occurs by chemical etch, using gas-phase radicals produced in a remote RF plasma. The Evactron C De-Contaminator uses a remote RF plasma to produce gas-phase radicals that flow downstream through the chamber, eliminating contamination.
    Over a 2,000 users of the Evactron De-Contaminator system report no X-ray window failures.
    The Evactron Model C includes:
    • RF Plasma Radical Source (PRS) and Controller
    • Pirani vacuum gauge and fixed RF Match
    • 0-20 Watt RF Generator @ 13.56 MHz feedback stabilized and harmonically suppressed
    • Just use air for oxygen radicals, or use other gases for alternative plasma processes
    • Air-bleed needle valve for manual flow and pressure adjustment
    • Bundled cable set, power cord, and instructions
    • Free 5 year limited warranty
    • Power interlock allows RF power to be on only when pressure is in operating range and RF cable is connected to PRS
    Specifications:
    • Electronic chassis: H, W, D: 5.5” x 9.375” x 9.75” (14 x 24 x 25 cm)
    • KF 40 vacuum mounting flange, adapter flanges available
    • 90-250 VAC 50/60 Hz input
    • Shipping— 16 lb. (8 kg.)
    The Evactron® Model C De-Contaminator also comes with a free 5-year warranty (must return to factory for repair).

  • e45_largeQuick view

    Evactron® Model 45 De-Contaminator

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    Evactron® Model 45 De-Contaminator
    This rack-mounted model can be embedded into SEMs, FIBs, and other vacuum systems, providing system manufacturers the ability to integrate remote plasma cleaning capability. The Evactron Model 45 Decontaminator (D-C) produces gas-phase radicals that flow downstream through the chamber, removing hydrocarbon contamination.
    Over 2,000 of the Evactron De-Contaminator systems report no X-ray window failures.

    Specifications:
    • Just use air for oxygen radicals, or use other gases for alternative plasma processes
    • Easy setup and operation. Preset pressure, power and time settings
    • Can be operated from either front panel or computer interface
    • Optional shroud can cover transducer and valve assembly on the Plasma Radical Source
    • Start cleaning by using chamber vent and evacuation controls
    • Advanced plasma detection logic
    • Cleaning and error logs record history and aid troubleshooting
    • Electronic chassis: H,W,D: 3.5” x 19” x 7” (9x23x48 cm)
    • RF Power: 5-20 Watts at 13.56 MHz
    • KF 40 vacuum mounting flange, adapter flanges available
    • 90-250 VAC 50/60 Hz input
    • Shipping— 20 lb. (10 kg.)
    The Evactron® Model 45 De-Contaminator also comes with a free 5-year warranty (must return to factory for repair).

  • e40_largeQuick view

    Evactron® Model 40 De-Contaminator

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    This rack-mounted model can be embedded into SEMs, FIBs, and other vacuum systems, providing system manufacturers the ability to integrate remote plasma cleaning capability. The Evactron 40 Decontaminator (D-C) produces gas-phase radicals that flow downstream through the chamber, removing hydrocarbon contamination.
    Over 2,000 users of the Evactron De-Contaminator system report no X-ray window failures.

    Specifications:
    • Just use air for oxygen radicals, or use other gases for alternative plasma processes
    • Easy setup and operation. Preset pressure, power and time settings
    • Evactron 40 D-C can only be operated from computer interface
    • Optional shroud can cover transducer and valve assembly on the Plasma Radical Source
    • Start cleaning by using chamber vent and evacuation controls
    • Advanced plasma detection logic
    • Cleaning and error logs record history and aid troubleshooting
    • Electronic chassis: H,W,D: 3.5” x 19” x 7” (9x23x48 cm)
    • RF Power: 5-20 Watts at 13.56 MHz
    • KF 40 vacuum mounting flange, adapter flanges available
    • 90-250 VAC 50/60 Hz input
    • Shipping— 20 lb. (10 kg.)
    The Evactron® Model 40 De-Contaminator also comes with a free 5-year warranty (must return to factory for repair).

  • e25Quick view

    Evactron® Model 25 De-Contaminator

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    This convenient tabletop model easily removes atmospheric hydrocarbons and carbon contamination from SEMs, FIBs, and other vacuum chambers. The Evactron 25 De-Contaminator uses a remote RF plasma to produce gas-phase radicals that flow downstream through the chamber, eliminating contamination.
    Over 2,000 users of the Evactron De-Contaminator system report no X-ray window failures.

    Specifications:
    • Used on nearly all makes and models of electron microscopes
    • Start cleaning by using chamber vent and evacuation controls
    • Preset pressure, power and time settings from front panel or computer interface
    • Just use air for oxygen radicals, or use other gases for alternative plasma processes
    • Advanced plasma detection logic
    • Cleaning and error logs record use history and aid troubleshooting
    • Electronic chassis: H, W, D: 5.5” x 9.375” x 9.75” (14 x 24 x 25 cm)
    • RF Power: 5-20 Watts at 13.56 MHz
    • KF 40 vacuum mounting flange, adapter flanges available
    • 90-250 VAC 50/60 Hz input
    • Shipping— 16 lb. (8 kg.)
    The Evactron® Model 25 De-Contaminator also comes with a free 5-year warranty (must return to factory for repair).

  • EP-DecontaminatorQuick view

    Evactron® EP De-Contaminator

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    The Evactron EP model was designed for those in the physics and materials science communities building and using custom-designed vacuum systems. The EP offers highest cleaning rates at low pressures. It uses flowing afterglow cleaning with air to clean carbon compounds from vacuum chambers operating with turbo molecular pumps, and has instant ignition from any vacuum level. The Evactron EP model is designed for manual control with front plasma cleaning switch and LED status lighters. It is set up with fixed operating conditions, time and power.

    Technology:
    Energy efficient hollow cathode plasma
    Flow through gas supply
    Plasma Radical Source design maximizes delivery of radicals to chamber
    “Pop” ignition of the plasma works at all pressures below 100Pa or 750 mTorr
    Low pressure operation @1-3 Pa for long lived radicals and the fast cleaning rates
    Can start and operate at turbo molecular pump compatible pressures
    Fixed match provides maximum plasma power transfer
    The best cleaning conditions are preset


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  • combiclean_largeQuick view

    Evactron® CombiClean™ System

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    The Evactron® CombiClean™System combines onboard vacuum cleaning chamber and external PRS (Plasma Radical Source) control in one unified system. Designed as a complete cleaning solution, the Evactron CombiClean System features an integrated vacuum chamber for desktop cleaning samples and vacuum parts, as well as an external Plasma Radical Source (PRS) for Evactron in-situ cleaning of E-beam instruments such as SEMs, Focus Ion Beams FIBs, and other analytic instruments by removing carbon contamination. The system monitors operation of either PRS unit, has internal memory, and is designed for routine operation with minimal operator training. Onboard control allows for changing the cleaning modes between external and internal PRS with just the flip of a switch. This system is compatible with rotary vane pumps without the worry of oil backstreaming. A dry nitrogen purge feature keeps specimens clean after a plasma cleaning, and a storage mode allows you to continue dry nitrogen purging a sample while the external PRS is in use.

    Click to see specification

    System Highlights
    The system features a microprocessor with embedded software to regulate a leak valve and control the chamber pressure by a MicroPirani gauge. The microprocessor also regulates the RF power, has a clock to time the downstream plasma cleaning and nitrogen purging cycles, and records the operational and fault log. Cleaning with the Evactron CombiClean System may be setup from either the front panel or a remote computer.
    • VentDetect™ Technology
    • Compatible with rotary vane pumps without the worry of oil backstreaming
    • Dry Nitrogen purge feature keeps specimens clean after plasma cleaning
    • Storage mode allows continued dry nitrogen purging of samples while external PRS is in use
    • System monitors operation of either PRS unit
    • Onboard control allows for cleaning modes between internal and external PRS with just the 0ip of a switch
    • Wide Pressure Range
    The Evactron® CombiClean™ System also comes with a free 5-year warranty (must return to factory for repair).


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  • e25zephyrQuick view

    Evactron® 25Zephyr™ De-Contaminator

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    This easy to use tabletop model easily removes atmospheric hydrocarbons and carbon contamination from SEMs, FIBs, and other vacuum chambers. The Evactron® 25Zephyr De-Contaminator uses a remote RF plasma to produce gas-phase radicals that flow downstream through the chamber eliminating contamination. The Evactron® 25Zephyr is created for chambers that use turbo molecular pumps (TMPs). The 25Z is designed to clean/de-contaminate in the turbo pressure regime at 1-50 mTorr and has no adverse effects on the TMP temperatures. The Evactron Model 45 De-Contaminator can also be upgraded to the Zephyr cleaning.

    Features:
    • Clean chambers at turbo pump pressures
    • 5-20 Watts RF power
    • ≥10x improved cleaning rate
    • One button operation
    • 1-50 mTorr operating pressure
    Benefits:
    • No stress to the turbo molecular pump
    • Safely de-contaminates the chamber without damage to sensitive components
    • Shorter cleaning time, giving increased production with less system down time
    • Cleans chamber while in “pump down”
    • Increased mean free path, yet ion damage free
    The Evactron® 25 Zephyr De-Contaminator also comes with a free 5-year warranty (must return to factory for repair).


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  • Evactron-Model-ES-De-ContaminatorQuick view

    Evactron® Model ES De-Contaminator

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    The new, revolutionary Evactron® ES De-Contaminator provides a new approach to plasma cleaning designed for OEM and system electron microscope manufacturers.

    The new, revolutionary Evactron® ES De-Contaminator provides a new approach to plasma cleaning designed for OEM and system electron microscope manufacturers. The ES model starts easily with patent pending “POP” plasma ignition process. This simplified Evactron Plasma Radical Source (PRS) performs high efficiency cleaning in almost any high vacuum system. It utilizes the same “flowing afterglow™” cleaning process that was introduced by XEI Scientific Inc. with its Evactron Zephyr™ models. It provides fast carbon cleaning rates from the plasma source when used with a turbo molecular pump (TMP). The Evactron ES model offers premium cleaning power at a low cost, rendering it able to be integrated on both low cost basic or premium SEMs and FIBs. The ES is extremely simple to operate and completely commanded from the SEM software, as it can be started from any vacuum pressure without evacuation system hassle.

    Features:
    • Small plasma radical source
    • Plasma source can be installed on chamber or load lock port
    • POP™ Plasma ignition
    • Fastest cleaning with “flowing afterglow™”
    • Rack mount for system integration
    • Elegant compact design
    Benefits:
    • Lightweight, no stress to the chamber or load lock
    • Versatile, dual purpose cleaning
    • Quick ignition
    • > 100 Å/min cleaning rate
    • Small footprint for system integration
    • Custom color PRS shrouds are available
    The Evactron® ES De-Contaminator also comes with a free 5-year warranty.

  • Evactron-softclean-chamberQuick view

    Evactron® SoftClean™ Chamber

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    Electron microscope image quality is greatly improved by the removal of hydrocarbon (H/C) contamination from microscope chambers and from specimen mounts, specimen holders...

    Electron microscope image quality is greatly improved by the removal of hydrocarbon (H/C) contamination from microscope chambers and from specimen mounts, specimen holders, and the specimens themselves. XEI Scientific developed the Evactron De-Contaminator to clean microscope chambers of their residual H/C contamination. The Evactron SoftClean Chamber extends the ability to pre-clean specimens, specimen mounts, and holders with the proven downstream plasma ashing process before examination in the chamber, thus insuring high image quality. The Evactron SoftClean Chamber can also be used as a specimen storage system, keeping samples in a clean environment. The downstream plasma process used in the Evactron SoftClean Chamber is gentle, yet very effective at removing H/C contamination. Sputter etching by other plasma cleaners can damage specimens through exposure to energetic ions and heat. The Evactron SoftClean Chamber uses reactive gas radicals to remove H/C from specimen surfaces by chemical etch, preserving critical sample fine structure. This downstream etching process breaks down problematic H/C residues into smaller molecules such as CO2, H2O and CO, which are easily pumped out of the chamber.

    Specifications:
    • Benchtop Plasma Cleaning
    • Chamber dimensions 8.5” (216 mm) diameter x 5 .5” (140 mm) height
    • 4 KF 40 and 1 KF 16 vacuum mounting flanges with manual shut-off valve for vacuum port
    • Adaptor flanges for all major manufacturers of TEM sample holders available
    • 1 venting port and a Plated Aluminum lid with 5.5″ diameter glass viewing port
    • Just use air for oxygen radicals, or use other gases for alternative plasma processes
    • Shipping — 12 lb (6 kg)
    Each model of the Evactron® SoftClean™ Chamber also comes with a free 5-year warranty (must return to factory for repair).


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