NanoPhoton -- RAMAN
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NanoPhoton RAMANdrive Wafer Analyzer.
RAMANdrive is the specialized Raman microscope for wafer analysis equipped with our dedicated 300 mm stage. RAMANdrive gives you an ultra-fast, highest resolution analysis of the whole wafer with unique stability and accuracy. The Nanophoton Stage Navigation System accepts data from your inspection system and use it to move the wafer to all indicated positions for a detailed analysis. The dedicated stage moves the wafer safely and with high accuracy to all areas of interest.
RAMANdrive uses high-quality dark-field microscopy to easily localize particles, even smaller than 100 nm. Analyzing the particle is done by very high-performance Raman spectroscopy and provides a detailed material composition. High quality confocal optics gives RAMANdrive high performance 3D Raman imaging capability. Stress distribution and polytype distribution can be clearly visualized in 3D with sub-micron resolution.
Stage Navigation system can upload a defect map obtained by an inspection tool.
Place the focused laser beam anywhere you want with our extended wafer stage. Large wafers of up to 300 mm can be placed on the stage. Vacuum lines are connected to small holes in channels, which allows a applied vacuum to flatten and hold the wafer on the stage. Our extended wafer stage makes it possible for the laser to access the entire exposed wafer surface. Even a tall sample also can be analyzed by placing it in the deep channel part of the stage.
NanoPhoton RAMANforce Laser Raman Microscope.
THE HIGHEST SPATIAL RESOLUTION
RAMANforce is equipped with dedicated optics and a high-quality TEM00 laser for the highest spatial resolution. With a 532 nm excitation wavelength and 0.90 NA (Numerical Aperture) objective, RAMANforce guarantees 350 nm spatial resolution for all users. Raman imaging data of fluorescent beads of 200 nm in diameter is shown on the right. The intensity profile along the dotted line in the Raman image demonstrates a spatial resolution of up to 300 nm. The high spatial resolution also enhances the detection sensitivity of tiny objects that are smaller than the diameter of the laser spot. RAMANforce is thus able to detect a small particle under 100 nm diameter.
THE FASTEST RAMAN IMAGING
The dedicated illumination mode developed by Nanophoton has dramatically improved the speed of Raman imaging by re-forming point laser beams into line shapes to cover a larger sample area. This patented line illumination excites Raman scattered light along the line-illuminated area simultaneously whereupon it is divided into 400 spectra by a large number of pixels using a CCD.
Our highest spatial resolution and high performance confocal optics enhance our sensitivity to detect tiny particles. The laser beam will be accurately focused on the center of a particle using galvanometer scanner, and a robust sample stage keeps the laser spot always precisely located during long exposure measurements. RAMANforce produces a spectrum with a high signal-to-noise ratio that allows particle identification to be done by a library search.