Frontier Semiconductor

Frontier Semiconductor

Frontier Semiconductor(FSM) from San Jose CA USA is a close partner of Quasi-S, to offer a range of advanced metrology products and solutions for semiconductor, LED, Solar, FPD, Data Storage and MEMS applications. With over 25 years experience in stress measurement, film adhesion testing, wafer topography metrology, and electrical characterization. The new and latest unique technology developed is to meet the metrology needs of 3D IC manufacturing. Quasi-S is working closely with FSM in providing solution to front end processes in manufacturing.
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  • Film Stress Bow Measurement Frontier Semiconductor FSMQuick view

    FSM 128 Series

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    Bow and Global Film Stress Measurement.
    Non-contact full wafer stress mapping for semiconductor and flat panel application.
    Dual Laser Switching Technology.
    128NT -- Base system. Up to 200mm wafer. Rotation Stage.
    128L -- Up to 300mm wafer. Rotation Stage.
    128G - 450 -- NEW. Up to 450mm wafer. Flat panels. Rotation Stage.
    128L C2C -- Cassette to cassette


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  • Film Stress Bow Measurement Frontier Semiconductor FSMQuick view

    FSM 413 Series

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    Substrate Thickness, Warp, and TTV Measurement
    - with or without Tape
    - for Wafer Backgrind and Etch Thinning processes.
    Non-contact Echoprobe Technology.
    Thin film and surface roughness options.
    413 SA -- Semi-automatic system with enclosure. Manual loading, automatic measurement up to 300mm.
    413 EC -- Manual loading, manual positioning system.
    413EC-MOT -- Auto-Mapping, manual loading system.
    413C2C -- Cassette to Cassette System for Wafer or Dicing tape frames

  • Film Stress Bow Measurement Frontier Semiconductor FSMQuick view

    FSM 500 Series

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    Stress Hysteresis Measurement up to 500C for thermal property and stability tests of thin films in air.
    Non-Contact Laser Scanning Technology.
    500TC -- Manually loading system. Cryo option.

  • Film Stress Bow Measurement Frontier Semiconductor FSMQuick view

    FSM 900 Series

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    Stress Hysteresis in vacuum or gas up to 900C for the study of annealing cycles.
    Thermal Desorption, Film Shrinkage, Reflectivity, and Resistivity options provide additional insight to causes of material changes with temperature.
    900TC-VAC -- 300mm chamber. Manual loading.
    900C2C -- 300mm fully automated Cassette to Cassette system.